Trusted Wafer Foundry

Microcircuit Emulation Center’s Trusted Wafer Fabrication Facility

  • On-shore wafer fabrication located in Princeton, NJ
    • Dedicated facility to DLA’s Microcircuit Emulation Programs and approved defense contractor
    • Accredited Department of War (DOW) Class 1A Trusted supplier since 2007
    • ISO 4 (Class 10) and ISO 5 (Class 100) cleanrooms
    • 25,000 square feet wafer fabrication facility
    • Processing six-inch silicon and silicon-on-insulator (SOI) substrates
    • Utilizing mainstream semiconductor process equipment systems
    • Computerized Manufacturing Execution System (MES) tracking system with automated lot tracking and history
    • Statistical Process Control (SPC) manufacturing processes
    • Compliant with the DLA-audited QML quality system with documented and audited procedures
    • Dedicated, experienced, and skilled operational, maintenance, process sustainment and development, and integration teams
    • Co-located with the MEC’s Design and Test capabilities
  • Self-sufficient capability performing all processing steps in-house
Diffusion Deposition Photolithography Implant Etch Metrology
LPCVD Silicon nitride TEOS Polysilicon Wet/Dry/RH oxides Platinum (Pt) Titanium (Ti) Titanium nitride (TiN) Aluminum copper (AlCu) Gap fill oxide (SiO2) Silicon nitride (Si3N4) Borophosphosilicate glass (BPSG) Phosphosilicate glass (PSG) Borosilicate glass (BSG) Epitaxial silicon (P and N type) DUV Steppers with integrated coat track 20-335 kV Off Angle Boron (BF2) Phosphorus Arsenic Dry & Wet Metal Polysilicon Silicon Silicon oxide Silicon nitride Deep trench Chemical mechanical polishing SEM CD-SEM Overlay measurement Thin film measurement Wafer inspection Defect analysis Yield improvement
  • Maintaining semiconductor processing for a diverse array of technologies from >3.0 μm to 0.35 μm technology nodes, including Analog, BiCMOS, CMOS, and Bipolar
Technology Node >3.0 μm 1.5 μm 1.2 μm 0.8 μm 0.5 μm 0.35 μm
Process Technology CMOS BiCMOS HV CMOS CMOS BiCMOS HV CMOS CMOS BiCMOS DTI Schottky CMOS BiCMOS CMOS SOI CMOS
Cleanroom technician operating wafer fabrication equipment Wafer processing equipment inside the foundry cleanroom Cleanroom technician working with wafer fabrication equipment